X-ray residual stress measurement of several ceramic coated films.

Recent Advances in the Measurement of Residual Stress by X-Ray Diffraction

Depth-resolved residual stress evaluation from X-ray diffraction measurement data using the approximate inverse method

The paper deals with the depth determination of residual stress states from diffraction data. First an historical overview of the known approaches is given. Then we apply the approximate inverse method to this problem. This method is known to be very efficient and stable with respect to noise-contaminated data. It is even possible to prove convergence and it allows an error estimate of the calc...

Measurement Capabilities of X-ray Fluorescence for Bpsg Films

Deposition of borophosphosilicate glass (BPSG) films as dielectrics is one of the many steps involved in semiconductor device manufacturing. Accurate control of boron and phosphorus concentrations in these films, is essential in maintaining desired film properties. The narrowing process specification limits with the industry trend towards shrinking device sizes, is putting an increasing demand ...

Relaxation of residual stress and reentanglement of polymers in spin-coated films.

Performing detailed studies of viscoelastic dewetting of thin polystyrene films on solid substrates, we demonstrate the existence of residual stress due to strongly out of equilibrium chain conformations and a reduced entanglement density resulting from film preparation by spin coating. The ratio of stress over elastic modulus was found to increase strongly with decreasing film thickness and in...

X-ray films of speech

(This demo was originally prepared by Phil Hoole for a CD-ROM illustrating use of QuickTime in science produced by Dr. M. Batschkus, Klinikum Grosshadern, Munich. In the present version, the original examples are followed by links to additional xray-films from the same corpus.) A few examples are given here of x-ray films of short sentences taken from a much larger corpus of x-ray material. The...